Plasma Chemistry
Introduction
Plasma chemistry is a branch of chemistry that deals with the interaction of plasma with matter. Plasma is a state of matter characterized by the presence of free electrons and ions. This makes plasma highly reactive, and it can be used to initiate and accelerate chemical reactions.
Basic Concepts
- Plasma is a state of matter characterized by the presence of free electrons and ions.
- Plasma is highly reactive and can be used to initiate and accelerate chemical reactions.
- The temperature of a plasma is measured in electron volts (eV).
- The electron density of a plasma is measured in cubic centimeters (cm-3).
Equipment and Techniques
- Plasma reactors are used to generate and maintain plasmas.
- Plasma reactors can be either DC or RF.
- DC plasma reactors use a direct current to generate and maintain the plasma.
- RF plasma reactors use a radio frequency to generate and maintain the plasma.
Types of Experiments
- Plasma chemistry experiments can be used to study a wide variety of chemical reactions.
- Gas-phase reactions
- Surface reactions
- Plasma-assisted deposition
- Plasma-assisted etching
Data Analysis
- Plasma chemistry data can be analyzed using a variety of techniques.
- Some of the most common techniques include:
- Mass spectrometry
- Optical emission spectroscopy
- X-ray diffraction
Applications
- Plasma chemistry has a wide range of applications, including:
- Semiconductor processing
- Flat panel display manufacturing
- Medical device manufacturing
- Surface modification
- Environmental remediation
Conclusion
Plasma chemistry is a powerful tool that can be used to study a wide variety of chemical reactions. It has a wide range of applications, including semiconductor processing, flat panel display manufacturing, medical device manufacturing, surface modification, and environmental remediation.